9/20/2010	8:33:47 PM	Program exited cleanly
9/20/2010	8:36:15 PM	Program started normally
9/20/2010	8:36:15 PM	Helium valve closed
9/20/2010	8:36:15 PM	H2 valve closed
9/20/2010	8:36:15 PM	BCl3 valve closed
9/20/2010	8:36:15 PM	PH3 valve closed
9/20/2010	8:36:15 PM	SiCl4 pre valve closed
9/20/2010	8:36:15 PM	SiCl4 post valve closed
9/20/2010	8:36:15 PM	Main Vac valve closed
9/20/2010	8:36:15 PM	Bypass valve closed
9/20/2010	8:36:15 PM	Bubbler valve closed
9/20/2010	8:36:15 PM	Helium MFC set to  0.000000
9/20/2010	8:36:15 PM	H2 MFC set to  0.000000
9/20/2010	8:36:15 PM	BCl3 MFC set to  0.000000
9/20/2010	8:36:15 PM	PHl3 MFC set to  0.000000
9/20/2010	8:36:15 PM	SiCl4 MFC set to  0.000000
9/20/2010	8:36:15 PM	Bypass solenoid MFC set to  760.000000
9/20/2010	8:36:16 PM	Tube furnace set to 0
9/20/2010	8:36:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/20/2010	8:36:18 PM	Recipe started at 8:36 PM
9/20/2010	8:36:18 PM	Helium valve closed
9/20/2010	8:36:18 PM	H2 valve closed
9/20/2010	8:36:18 PM	BCl3 valve closed
9/20/2010	8:36:18 PM	PH3 valve closed
9/20/2010	8:36:18 PM	SiCl4 pre valve closed
9/20/2010	8:36:18 PM	SiCl4 post valve closed
9/20/2010	8:36:18 PM	Main Vac valve closed
9/20/2010	8:36:18 PM	Bubbler valve closed
9/20/2010	8:36:18 PM	Bypass valve opened
9/20/2010	8:36:18 PM	Helium MFC set to  0.000000
9/20/2010	8:36:18 PM	H2 MFC set to  0.000000
9/20/2010	8:36:18 PM	BCl3 MFC set to  0.000000
9/20/2010	8:36:18 PM	PHl3 MFC set to  0.000000
9/20/2010	8:36:18 PM	SiCl4 MFC set to  0.000000
9/20/2010	8:36:18 PM	Bypass solenoid MFC set to  0.000000
9/20/2010	8:36:18 PM	Tube furnace set to 0
9/20/2010	8:36:18 PM	Helium valve closed
9/20/2010	8:36:18 PM	H2 valve closed
9/20/2010	8:36:18 PM	BCl3 valve closed
9/20/2010	8:36:18 PM	PH3 valve closed
9/20/2010	8:36:19 PM	SiCl4 pre valve closed
9/20/2010	8:36:19 PM	SiCl4 post valve closed
9/20/2010	8:36:19 PM	Bubbler valve closed
9/20/2010	8:36:19 PM	Main Vac valve opened
9/20/2010	8:36:19 PM	Bypass valve opened
9/20/2010	8:36:19 PM	Helium MFC set to  0.000000
9/20/2010	8:36:19 PM	H2 MFC set to  0.000000
9/20/2010	8:36:19 PM	BCl3 MFC set to  0.000000
9/20/2010	8:36:19 PM	PHl3 MFC set to  0.000000
9/20/2010	8:36:19 PM	SiCl4 MFC set to  0.000000
9/20/2010	8:36:19 PM	Bypass solenoid MFC set to  0.000000
9/20/2010	8:36:19 PM	Tube furnace set to 0
9/20/2010	8:36:19 PM	Run finished at 8:36 PM
9/20/2010	8:36:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
